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© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 1
Rochester Institute of Technology
Microelectronic Engineering
ROCHESTER INSTITUTE OF TECHNOLOGYMICROELECTRONIC ENGINEERING
MEMS 2012
Dr. Lynn Fuller, Ivan Puchades
Microelectronic EngineeringRochester Institute of Technology
82 Lomb Memorial DriveRochester, NY 14623-5604
Email: Lynn.Fuller@rit.eduDr. Fuller’s Webpage: http://www.people.rit.edu/lffeee
MicroE Webpage: http://www.microe.rit.edu
12-5-2011 MEMS2011.ppt
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 2
Rochester Institute of Technology
Microelectronic Engineering
OUTLINE
ProjectsMEMS Chip Designs
ResistorsDiodesPressure SensorGas Flow SensorMultisensor1-Axis Accelerometer3-Axis AccelerometerTemperature & Chemical ProbeThermopilePeltier Heat Pump
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 3
Rochester Institute of Technology
Microelectronic Engineering
PROJECTS
Chip Designs for MEMS Fabrication ClassNew MEMS Devices
Micro Bolometer / Sensor or ImagerMEMS SwitchesMEMS Resonator / Filter / SwitchMEMS Surface Micromachine Process
Energy HarvestingEnergy Source
ElectromagneticPhotovoltaicPiezoelectric
Testing of John Galt CMOS ChipsPCB Packages for MEMS and CMOSProcess Development
Lam 4600 as Silicon EtcherWireless Sensor NetworkResearch Projects Dr.WatSen, PRISM, Oil QualityISFETs
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 4
Rochester Institute of Technology
Microelectronic Engineering
RESISTORS
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 5
Rochester Institute of Technology
Microelectronic Engineering
DIODES
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 6
Rochester Institute of Technology
Microelectronic Engineering
PRESSURE SENSOR
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 7
Rochester Institute of Technology
Microelectronic Engineering
GAS FLOW SENSOR
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 8
Rochester Institute of Technology
Microelectronic Engineering
MULTISENSOR
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 9
Rochester Institute of Technology
Microelectronic Engineering
1 AXIS ACCELEROMETER
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 10
Rochester Institute of Technology
Microelectronic Engineering
3-AXES ACCELEROMETER
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 11
Rochester Institute of Technology
Microelectronic Engineering
TEMPERATURE AND CHEMICAL SENSOR PROBE
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 12
Rochester Institute of Technology
Microelectronic Engineering
THERMOPILE (SEEBECK EFFECT)
© January 22, 2011 Dr. Lynn Fuller, Professor
MEMS 2012
Page 13
Rochester Institute of Technology
Microelectronic Engineering
PELTIER EFFECT HEAT PUMP
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