Récupération d’énergie mécanique piézoélectrique

Récupération d’énergie mécanique piézoélectrique

https://greman.univ-tours.fr/

Guylaine POULIN-VITTRANT



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Le monde de demain a besoin de

+ intégrables + performants + propres + efficaces en énergie

Le développe 3 champs de recherche:

Structuration en 4 équipes

Img ©flaticon.com

110 personnes

La recherche au GREMAN - Champs d’application ciblés

Production, stockage & conversion de l’énergie électrique

Electronique nomade & récupération d’énergie

Mesures, contrôles et diagnostics pour l’industrie et la médecine

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Le GREMAN - 3 sites géographiques

Tours Sud

UFR Sciences et Techniques

Tours Nord

Site industriel de STMicroelectronics

Blois

INSA Centre Val de Loire

IUT de Blois

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5

PileGestion

d’alimentationMesure/action etCommunication

Récupération d’énergieUne alternative pour l’alimentation des objets communicants

Capteur cérébralCapteur

cochléaire

Capteur pulmonaire

Capteur activité musculaire

Capteur cardiaque

Capteur GPS

HarvesterGestion


Les sources d’énergie• Rayonnée : lumière, infrarouge, radio fréquence• Cinétique : vibration, mouvement• Thermique : gradients ou variations de température• …

Batterie

Capteur cérébralCapteur

cochléaire

Capteur pulmonaire

Capteur activité musculaire

Capteur cardiaque

Capteur GPS


HarvesterGestion


Les sources d’énergie• Rayonnée : lumière, infrarouge, radio fréquence• Cinétique : vibration, mouvement• Thermique : gradients ou variations de température• …

Batterie

- - -

+++

+

-

-

+F

F

Effet piézoélectrique direct


Récupération d’énergie mécaniquepar les matériaux piézoélectriques

… au GREMAN

FabricationSynthèse de nanostructures ZnOFabrication de composants à nanostructures ZnO : nanogénérateurs, transistors

ModélisationModèles Analytiques ou Eléments Finisde générateurs piézoélectriques:• Composites à nanofils• Poutres vibrantes à couche

piézocéramique

CaractérisationStructurale (DRX, MEB, AFM…)Electrique:• Spectroscopie d’impédance• Caractérisation I-VFonctionnelle:• Banc de test en vibration• Banc de test en compression Aluminium stack

Shaker arm

Rubber

Strain gauge

VING

Screw

Mechanical energy harvesting by piezoelectricmaterials

Compression Flexion

Quasi-static

Dynamic

<< resonance

Dynamic

at resonance

The type of mechanical excitation will determine the structure, workingmode and power level.

Forced

regime

at f < fresonance

Forced regime

at fresonance

or

Free vibration

Pconv

Freq

High stress

Impact

Quasi-static force

Low stress

Dynamic force

9

10

Mechanical energy harvesting by piezoelectricmaterialsPiezoelectric bimorph :Thien HOANG, PhD thesis, 2019, in collab. with VERMON

Resonance Anti-resonance

Average output power

Contact:[email protected]@univ-tours.fr

mailto:[email protected]

mailto:[email protected]


Material Quartz BaTiO3 PZT KNN MFC PVDFPZN-

9PTAlN GaN ZnO

d33(10-12 m/V)

2,3 90300 à

700200 400 30 2500 7 1,9 10

Quartz PZT ceramics (50’s)

PVDF film (1969)

Macro Fibre Composites (early 90’s)

Monocristals(early 2000)

Piezocomposites(early 90’s)

Nanowires(early 2000)

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12

Choice of the best piezoelectric material for a given application:Intrinsic figure of merit?

Importance of piezo coefficients but also dielectric permittivity

S. Priya, IEEE Trans. Ultrason. Ferro. Freq. Control 57(12) (2010) 2610-2612

Behind a FoM, some specific conditions (type of excitation and electrical load)

𝐹𝑜𝑀 = 𝑑. 𝑔 𝐹𝑜𝑀 =𝑑. 𝑔

tan 𝛿

Far from resonance:

𝐹𝑜𝑀 =𝑑2

ε tan 𝛿

efficiency𝐹𝑜𝑀 =𝑑. 𝑔

𝑠33𝐸 =

𝑊𝑐𝑜𝑛𝑣

𝑊𝑚𝑒𝑐𝑎= 𝑘33

2

At resonance of a cantilever beam 𝐹𝑜𝑀 =𝑘312 𝑄𝑚

𝑠11𝐸



Material Quartz BaTiO3 PZT KNN MFC PVDFPZN-

9PTAlN GaN ZnO

d33(10-12 m/V)

2,3 90300 à

700200 400 30 2500 7 1,9 10

Quartz PZT ceramics (50’s)

PVDF film (1969)

Macro Fibre Composites (early 90’s)

Monocristals(early 2000)

Piezocomposites(early 90’s)

Nanowires(early 2000)

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14

EnSO project is focusing on Autonomous Micro Energy Sources (AMES) :

EnSO “Energy for Smart Objects” (ECSEL H2020 project, 2016-2020)

Datatransmit

Dataprocessing

Sensor

AutonomousMicro Energy

Source

AMES

Ambient energy

http://www.enso-ecsel.eu

Energy storage

Power converter

Energy harvesting

Wireless charging

Demonstrate the competiveness and manufacturing readiness of AMES (large scale pilot line)

Disseminate and standardize EnSO energy solutions

SolarThermalMechanical

http://www.enso-ecsel.eu/


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Effect of composite structuration

H J Lee et al., Sensors 2014, 14, 14526-14552

S. Boubenia, Thèse Univ. Tours, 2019

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Piezoelectric nanogenerators incorporating ZnOnanowires

Wang et al., Materials today 7, 6 (2004) 26–33

Zinc oxide nanostructures : a multi-functional material

Wurtzite type crystal structure of ZnO Substrate compatibility

Single-crystalline highly aligned ZnO NWs Large area NWs arrays on a variety of substrates: silicon, glass and plastic Preferentially c-axis oriented perpendicular to the growth substrate Semiconducting : wide band gap of 3.37 eV at room temperature Piezoelectric : higher piezo coefficient than bulk ZnO

Large family of nanostructures

Opoku et al. Nanotechnology 26 (2015) 355704

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Main attractions: Higher piezo coefficient compared to bulk ZnO


Transverse Force

LongitudinalForce

V-

V+

V-

V+

E. L. Perez, Thèse Univ. Grenoble Alpes, 2016


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Main attractions: Higher piezo coefficient compared to bulk ZnO Does not fracture easily [1] Failure of one nanowire (NW) may not compromise operation Energy generation over a range of frequencies (1Hz to some 100 Hz) Biocompatible


Transverse Force

LongitudinalForce

V-

V+

V-

V+

[1] H. D. Espinosa et al., Adv. Mater. 2012, 24, 4656-4675


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Autoclave

Reactants:• Zinc nitrate hexahydrate : Zn(NO3)2 · 6H2O• HMTA (Hexamethylenetetramine) : (CH₂)₆N₄• Ammonia : NH4OH

Hydrothermal synthesis of ZnO nanowires (NWs):

Major advantages:

Low temperature (85-100 ˚C) Compatible with industrial processes

Major limitations:

Defects decrease of output voltageOpoku et al., Nanotechnology 26 (2015) 355704Opoku et al., RSC Adv. 5 (2015) 69925-69931Boubenia et al., Scientific Reports (2017)

NWs length versus growth time



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Wish list

ZnO NWsLow-cost synthesis : hydrothermal synthesis (85°C) Highly orientated along polar axisStrong NW adhesion to substrateHigh quality ZnO NWs : intensive research on how to decrease the intrinsic N-type doping of ZnO NWs (usually 1018cm-3) by 1 or 2 decades

Polymer matrix

Top contact

All must be performed at temp <100oC

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ZnO NWs

Polymer matrixFully conformalStrong adhesionSimple depositionAllow NWs to flexCreates capacitive coupling

Top contact

Parylene Cdeposited by CVD (Chemical VaporDeposition)

All must be performed at temp <100oC

Wish list


22All must be performed at temp <100oC

ZnO NWs

Polymer matrix

Top contactGood adhesion on polymerElectrically conductiveMechanically robustFlexible if the whole NG is research on flexible electronics

Ti/Al electrodedeposited bysputtering

Wish list


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ZnO NWs

Polymer matrix

Top contactGood adhesion on polymerElectrically conductiveMechanically robustFlexible if the whole NG is research on flexible electronics

Ti/Al electrodedeposited bysputtering

100/400 nm

300 nm

1.2 µm

100/200 nm

Ti/AlParylene C

ZnO NWs

Ti/Au

Manufacturing process : video available on https://youtu.be/n9-4dSQrveU

Wish list

https://youtu.be/n9-4dSQrveU

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Dedicated test bench for piezogenerators

Aluminium stack

Shaker arm

Rubber

Strain gauge

VING

Screw

Computer

Mechanicalshaker

Oscilloscope

Resistivedecade box

AmplifierFunctiongenerator

Keithleycurrent meter

• Compressive force in contact or impact mode up to 13N, 10Hz• Voltage measured via a high input impedance double buffer circuit• Variable resistive load up to 130 M

SNGU


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Varying compressive force

Durability test

High pressure sensitivity of 0.1 V/kPa

@ 3 N, 7 Hz, 1 cm2:Peak power : 0.6 µWAverage power : 0.1 µW

0 1 2 3 4 5 6-8

-4

0

4

8

12110 kPa

96 kPa76 kPa

Op

en

circu

it v

olta

ge

(V

)

Time (sec)

50 kPa

Area of device = 1.2 cm2

Frequency = 5 Hz

40.0k 60.0k 80.0k 100.0k 120.0k2

4

6

8

10

Experimental data

Linear fitting

Op

en

circu

it v

olta

ge

(V

)

Pressure (Pa)

Frequecny @ 5Hz

Resistance@128 M

S = 0.09 V/kPa

Power vs load resistance

-2

-1

0

1

2

3

40000 20000 10000 1000 500

Op

en

circu

it v

olta

ge

(V

)

Time (a.u.)

6N, 5Hz

1

Number of stress cycles

104

105

106

107

108

0.0

100.0n

200.0n

300.0n

400.0n

500.0n

600.0n

Pow

er

(W)

Resistance ()

3Hz

5Hz

7Hz

Pressure = 50 kPa


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Large area device on bank cards

Hand excitation

10k 100k 1M 10M 100M 1G0.0

10.0µ

20.0µ

30.0µ

40.0µ

50.0µ Hand tapping @100kPa

Active area = 8cm2

Load Resistance (ohm)

Po

we

r (W

att)

10k 100k 1M 10M 100M 1G

0

5

10

15

20

25

30

@100kPa

Active area = 8cm2

Load Resistance (ohm)

Voltage

(V

)

2.0µ

4.0µ

6.0µ

8.0µ

10.0µ

12.0µ

Cu

rren

t (A

) 35 µW

Front side Back side

Direct connection with LCD

Drive electronic devices such asLiquid Crystal Display


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Acknowledgments

Former members

Sarah Boubenia

Daniel Alquier

François Morini

AbhishekDahiya

http://www.nanofil-flexible.fr/

Camille Justeau

Kevin Nadaud

Kiron P. RajeevCharles

Opoku

Nicolas Camara

Christopher Oshman

Damien Valente

TaoufikTlemcani

ChandraChandraiahgari


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“ZnO nanowires” project was supported by:

• The collaborative technological platform CERTEM 2020

• Région Centre funding “MEPS” (Module à Energie Perpétuelle sur Substrat flexible)

• National funding ANR “FLEXIBLE” (ANR-14-CE08-0010-01)


• ECSEL JU “EnSO” project under grant agreement N° 692482


“Piezoelectric devices for energy harvesting” project was supported by:

• ANR LabCOM “Lab-TMEMS” (Transducteurs et Microconvertisseurs

Electromécaniques pour applications MédicaleS)

• Région Centre funding “DIPIR” (Dispositif piézoélectrique sans plomb de

récupération d’énergie)

Acknowledgments



http://www.regioncentre-valdeloire.fr/accueil/les-services-en-ligne/appels-a-projets/recherche-et-innovation.html

http://www.regioncentre-valdeloire.fr/accueil/les-services-en-ligne/appels-a-projets/recherche-et-innovation.html

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T. Hoang, G. Poulin-Vittrant, G. Ferin, F. Levassort, C. Bantignies, A. Nguyen-Dinh, M. Bavencoffe, Parametric study of a thin piezoelectric cantilever for energy harvesting applications, Advances in Applied Ceramics, 117 (2017) 231-236https://doi.org/10.1080/17436753.2017.1403538

K. Nadaud, G. Poulin-Vittrant, D. Alquier, Effect of the excitation waveform on the average power and peak power delivered by a piezoelectric generator, Mechanical Systems and Signal Processing 133 (2019) 106278https://doi.org/10.1016/j.ymssp.2019.106278

G. Poulin-Vittrant, A. S.Dahiya, S. Boubenia, K. Nadaud, F. Morini, C. Justeau, D. Alquier, Challenges of low-temperature synthesized ZnO nanostructures and their integration into nano-systems, Materials Science in Semiconductor Processing 91 (2019) 404-408https://doi.org/10.1016/j.mssp.2018.12.013

A. S. Dahiya, F. Morini, S. Boubenia, K. Nadaud, D. Alquier, G. Poulin-Vittrant, Organic/Inorganic hybrid stretchable piezoelectric nanogenerators for self-powered wearable electronics, Advanced Materials Technologies (2017) 1700249https://doi.org/10.1002/admt.201700249

A. S. Dahiya , C. Opoku, G. Poulin-Vittrant, N. Camara, C. Daumont, E. G. Barbagiovanni, G. Franzò, S. Mirabella, D. Alquier, Flexible organic/inorganic hybrid field-effect transistors with high performance and operational stability, ACS Appl. Mater. Interfaces 9 (1) (2017) 573–584http://dx.doi.org/10.1021/acsami.6b13472

A.S. Dahiya, C. Opoku, R.A. Sporea, B. Sarvankumar, G. Poulin-Vittrant, F. Cayrel, N. Camara, D. Alquier, Single-crystallineZnO sheet source-gated transistors, Scientific Reports 6 (2016) 19232https://doi.org/10.1038/srep19232

References

https://doi.org/10.1080/17436753.2017.1403538

https://doi.org/10.1016/j.ymssp.2019.106278

https://doi.org/10.1016/j.mssp.2018.12.013

https://doi.org/10.1002/admt.201700249

http://dx.doi.org/10.1021/acsami.6b13472

https://doi.org/10.1038/srep19232

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Récupération d’énergie mécanique piézoélectrique